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잉곳 제조용 MCZ 초전도자석

Superconducting Magnet for MCZ Growing

WET Type (1,600mm)

Overview


This is the magnet required to produce ingots, a key material in making silicon wafers. It can implement a magnetic Horizontal Field, which is necessary to grow large-diameter Ingot uniformly.


In addition, the maintenance and management costs are less than 1/50 compared to existing phase conduction magnets. And also, the existing silicon wafer production facilities have been improved more effectively, reducing the production cost of lngots in large diameters.

General Specification for Horizontal Type

Outer diameter
2,370mm
Operation current
125 ~ 150A
Inner diameter
1,600mm
Cooling method
Liquid He Zero boil off 1W
Height
1,380mm
No. of cryocooler
2
Weight
12.5ton
Warranty
1 year (exclude PM)
Magnetic field
3.5kG ~ 4.5kG at center
Certification
ISO9001, ISO14001, TUV

General Specification

Cryostat Height
1,380mm
Outer Diameter
2,370mm
Inner Diameter
> 1,600mm
Upper Cryocooler
532mm
Bottom Cryocooler
356mm
Total Height
2,268mm

Components

No.
ItemQ'tyRemark
1
Magnet& Cryostat1 system
2
Helium Compressor2 unitsIncluding flexible lines
3
Magnetic Shield

Low Carbon steel (delivered in installed state)

4

Control System

    Magnet Power Supply

    Temperature Monitor

    Interlock & Control Software

    Instrumentation cable & Power cable

   Cooling water manifold with flowmeters

1 system

Detailed Specification

ItemValue
MagnetCoils
Circular Saddle type (JH Patent)
Field Direction
Horizontal
Center Field
3.5KG; Max field can be changed to 4.5KG
Operation Current
125A ~ 150A

Max Field in Coil

6T
Strand
NbTi : Ø1.05m
Current Lead
HTS 340A Class ; 90mW heat leak
Quench Protection
Passive type
CryostatInner Diameter
1,600mm
Outer Diameter
2,200mm
Height
1,400mm + (900mm Cryocooler)
Thermal Shield
50K / 20K
Cooling type
Liquid helium Zero Boil off 1W
Total cooling loss
< 1W@4.2K

Features

Coil

  • Saddle type
  • good field homogeneity
  • Optimize in growing(less oxygen from quartz wall)
  • No limit the winding size
  • Balanced force on coils  (stable operation )
    - Less stay field
    - Patent winding method

Requirement resources

Electric Power

  • Input Voltage : 3P 230V ; can be modified by demanding

  • Two Cryocoolers : 10kWx2 unit = 20kW max

  • Magnet Power Supply & Control unit  : 3kW

High purity Helium gas 47L cylinder : 3 units

  • For initial cooling

Liquid Helium :  1000L for initial cooling

Liquid Nitrogen :  800L for initial cooling

Cooling water :  < 15°C@30L/min

Magnetic Profile

XY Plane Magnetic Profile

Equal-field line interval

- 0.01T(100G)

XZ Plane Magnetic Profile

Equal-field line interval

- 0.01T(100G)


Packaging

Magnets are packed in huge wooden boxes. Various accessories are enclosed. And the power supply is packaged separately.


Delivery

It takes about 2-3 months from manufacture to delivery. This is because it is produced after receiving the order (order-and-made method).



Installation

It’s a plug-and-play method, so magnet can be installed quickly.

Warranty

The warranty of the product is one year from the date of arrival.


HEAD OFFICE

주소 : 경기도 안양시 동안구 엘에스로91번길 32-19

TEL : +82-31-416-1774

BRANCH OFFICE

주소 : 서울시 강북구 삼양로 510-5 (마루스위트30) 201호   TEL : +82-2-907-1339

CopyrightⓒJHENG All Rights Reserved.

HEAD OFFICE

주소 : 경기도 안양시 동안구 엘에스로91번길 32-19   TEL : +82-31-416-1774

BRANCH OFFICE

주소 : 서울시 강북구 삼양로 510-5 (마루스위트30) 201호    TEL : +82-2-907-1339

CopyrightⓒJHENG All Rights Reserved.